Aluminum Nitride Thin Film Acoustic Wave Device for Microfluidic and Biosensing Applications

Aluminum Nitride Thin Film Acoustic Wave Device for Microfluidic and Biosensing Applications

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Pages: 38

Published: 11 years ago

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Book Description

A paper that tackles film bulk acoustic wave devices for microfluidic piezoelectric films and use of aluminum nitride as a common piezoelectric material for biosensing applications.

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